Equipment
Listed below are the major microscopes, ancillary equipment, and facilities available to users of the Microscopy Suite. Click the equipment name for more information on each piece of equipment.
Please be aware that the ITG staff cannot respond to questions about particular pieces of equipment or software packages unless those questions are related to research conducted in the ITG laboratories. The ITG does not sell, lease, or distribute equipment or software, save that clearly marked as developed by the ITG.
Equipment
P-6 Stylus Profiler
The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:
-- Low noise floor improves measurement sensitivity to characterize small topography
-- Less than 6A step height repeatability ensures stringent process control
-- 150mm X-Y sample stage enables single measurement to cover full substrate
-- 2D stress measurement and analysis minimizes defects and improves yield
-- Powerful yet easy to use analysis software offers flexibility for advanced applications
For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.
| Primary Contacts | |
|---|---|
| Secondary Contacts | |
| Manufacturer | KLA-Tencor |
| Equipment Model | P-6 |
| Location | B606 F |
| Phone Numbers | (217) 265-5071 |
Facilities
Wet Lab - B612
Bench space, fume hood, some chemicals and solvents, dual source metal evaporator, pH meter, dissecting scope, microbalance, glow discharge system, reverse osmosis water purification system, sonicator, sputter coater, critical point dryer, low speed bone saw, osmium plasma coater, and other equipment.
BL-2 Lab - B420
Bench space, biosafety cabinet for sample manipulations, centrifuge, and two incubators for short-term sample storage.
Microscopy Suite
405 North Mathews Avenue, Urbana, IL
61801 USA
(217) 300-0566