Fees
Fees/rates for use of equipment in the Microscopy Suite are determined through analysis by Government Costing, University of Illinois. In effect starting August 1, 2021; subject to change.
A note on the rates: Most users are charged the internal rate. Internal with F&A is reserved for outside UofI educational institutions, while External with F&A is reserved for businesses with whom we create a working contract.
Optical Profilometer
Keyence Optical Profilometer VR-6000
The VR-6000 Wide-Area Optical Profiler performs non-contact measurement to replace stylus profilometers and roughness meters. This 3D profile system captures full-surface data across the target at 0.1 µm resolution, enabling measurement of features that cannot be measured with probe-type instruments. The system captures detailed surface topography without the need for sample preparation or physical contact, making it ideal for delicate or soft materials.
The VR-6000 enables users to acquire full-field surface data in seconds, generating accurate measurements of roughness, step height, volume, and form. Its intuitive software allows for streamlined analysis, automated measurement routines, and easy data visualization, supporting both routine quality control and advanced research applications.
Key capabilities include:
- High-speed 3D surface imaging with sub-micron resolution
- Non-contact measurement, eliminating risk of sample damage
- Quantitative analysis of surface roughness, height, and volume
- Large field-of-view with stitching for extended area analysis
- User-friendly interface with customizable workflows
For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.
| Primary Contacts | |
|---|---|
| Secondary Contacts | |
| Manufacturer | Keyence |
| Equipment Model | VR-6000 series |
| Location | B650R |
| Phone Numbers | (217) 265-5071 |
Notes:
* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.
* AFM probes are priced at cost and subject to change at any time.
Microscopy Suite